Wafer Manufacturing: Shaping Of Single Crystal Silicon Wafers

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.

• | By (Author): Imin Kao
• | Publisher: John Wiley & Sons Inc
• | Publication Date: Jan 29, 2021
• | Country of Publication: United States
• | Number of Pages: 304 pages
• | Language: Unknown
• | Binding: Hardback
• | ISBN-10: 0470061219
• | ISBN-13: 9780470061213