Fundamental Principles of Optical Lithography: The Science of Microfabrication - 9780470727300

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

• | By (Author): Chris Mack
• | Publisher: John Wiley & Sons Inc
• | Publication Date: Nov 16, 2007
• | Country of Publication: United States
• | Number of Pages: 534 pages
• | Language: Unknown
• | Binding: Paperback|Softback
• | ISBN-10: 0470727306
• | ISBN-13: 9780470727300