Solid-State Physics, Fluidics, And Analytical Techniques In Micro- And Nanotechnology

Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.

• | By (Author): Marc J. (University Of California, Irvine, Usa) Madou
• | Publisher: Taylor & Francis Inc
• | Publication Date: Jul 13, 2011
• | Country of Publication: United States
• | Number of Pages: 656 pages
• | Language: Not Available
• | Binding: Hardback
• | ISBN-10: 1420055119
• | ISBN-13: 9781420055115